Share Email Print
cover

Proceedings Paper

Optical microscope combined with the nanopipette-based quartz tuning fork-atomic force microscope for nanolithography
Author(s): Sangmin An; Corey Stambaugh; Soyoung Kwon; Kunyoung Lee; Bongsu Kim; Qwhan Kim; Wonho Jhe
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

We demonstrated the optical microscope (OM) combined with nanopipette-based quartz tuning fork - atomic force microscope (QTF-AFM) for nanolithography. The nanoparticle (Au, 5 nm), nanowire, PDMS solutions are ejected onto the substrate through the nano/microaperture of the pulled pipette, and the nano/microscale objects were in-situ formed on the surface with the proposed patterning system, while the position is defined by monitoring the phenomena on the substrate with a home-made OM. After forming of capillary condensation between apex of the pipette tip and the surface, the electric field is applied to extract out the inside liquid to the substrate and the nano/microscale objects are fabricated. The nanoscale patterning size can be controlled by the aperture diameters of the pulled pipette.

Paper Details

Date Published: 26 September 2013
PDF: 6 pages
Proc. SPIE 8816, Nanoengineering: Fabrication, Properties, Optics, and Devices X, 881608 (26 September 2013); doi: 10.1117/12.2036779
Show Author Affiliations
Sangmin An, Seoul National Univ. (Korea, Republic of)
Corey Stambaugh, National Institute of Standards and Technology (United States)
Soyoung Kwon, Seoul National Univ. (Korea, Republic of)
Kunyoung Lee, Seoul National Univ. (Korea, Republic of)
Bongsu Kim, Seoul National Univ. (Korea, Republic of)
Qwhan Kim, Seoul National Univ. (Korea, Republic of)
Wonho Jhe, Seoul National Univ. (Korea, Republic of)


Published in SPIE Proceedings Vol. 8816:
Nanoengineering: Fabrication, Properties, Optics, and Devices X
Eva M. Campo; Elizabeth A. Dobisz; Louay A. Eldada, Editor(s)

© SPIE. Terms of Use
Back to Top