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Proceedings Paper

Nondestructive optical characterization of MEMS
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Paper Abstract

Advances in emerging technology of microelectromechanical systems (MEMS) are one of the most challenging tasks in today's experimental mechanics. More specifically, development of these miniature devices requires sophisticated design, analysis, fabrication, testing, and characterization tools that have multiphysics and multiscale capabilities, especially as MEMS are being developed for use at harsh conditions. In harsh-environment and high-performance guidance applications inertial sensors must be sensitive to low rates of rotation yet survive the high blast loads associated with the initial launch. In this multi-year study a set of tuning fork gyroscopes (TFGs) were subjected to a series of increasing g-loads (culminating at approximately 60,000 g’s) with measurements of shape made after each test. High-g-testing was conducted within the large test chamber using a custom fabricated mini powder gun. A custom set of test sample packages were hermetically sealed with glass lids to allow optical inspection of components while preserving the operating (vacuum) environment. Optical and interferometric measurements have been made prior to and after each shock g-loading. The shape of the TFG test articles was measured using optoelectronic laser interferometric microscope (OELIM) methodology. Line traces were extracted from pertinent structures to clearly examine changes in the TFG. Failure of the die was observed in the form of fractures below the chip surface as well as fractures in the glass lid sealing the package.

Paper Details

Date Published: 10 October 2013
PDF: 9 pages
Proc. SPIE 8916, Sixth International Symposium on Precision Mechanical Measurements, 891602 (10 October 2013); doi: 10.1117/12.2036620
Show Author Affiliations
Ryszard J. Pryputniewicz, Worcester Polytechnic Institute (United States)

Published in SPIE Proceedings Vol. 8916:
Sixth International Symposium on Precision Mechanical Measurements
Shenghua Ye; Yetai Fei, Editor(s)

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