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Proceedings Paper

Scattering from optical surfaces and coatings: an easy investigation of microroughness
Author(s): Claude Amra; Didier Torricini; Yannick Boucher; Laurent Bruel; Emile P. Pelletier
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Paper Abstract

We show how the anisotropy of scattering enables to point out the origin of microroughness in optical coatings with no ambiguity. Experimental results prove that residual roughness due to material microstructure is negligible with coatings produced by Ion Assisted or Ion Plating deposition. In these conditions, and provided that the substrate is measured before coating, prediction of scattering from a stack of any design requires the knowledge of only two cut-off frequencies that describe the action of materials at interfaces. These parameters can be determined with single layers and then can be used for more complex optical systems. Since isotropy degree variation of scattering does not depend on the design of the coating, it enables to show that the differences that can occur between calculation and measurements are due to thickness or index errors on the layers. Therefore the substrate roughness plays a primordial role and we compare, using numerical calculation, the roughness spectra that can be obtained with mechanical or optical measurements.

Paper Details

Date Published: 1 August 1990
PDF: 10 pages
Proc. SPIE 1270, Optical Thin Films and Applications, (1 August 1990); doi: 10.1117/12.20366
Show Author Affiliations
Claude Amra, Ecole Nationale Superieure de Physique Marseille (France)
Didier Torricini, Ecole Nationale Superieure de Physique Marseille (France)
Yannick Boucher, Ecole Nationale Superieure de Physique Marseille (France)
Laurent Bruel, Ecole Nationale Superieure de Physique Marseille (France)
Emile P. Pelletier, Ecole Nationale Superieure de Physique Marseille (France)

Published in SPIE Proceedings Vol. 1270:
Optical Thin Films and Applications
Reinhard Herrmann, Editor(s)

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