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Proceedings Paper

Straightness measurement system based on phase sensitive detection technique
Author(s): Pei Huang; Yan Li; Haoyun Wei
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Paper Abstract

This paper presents a measurement method for straightness errors based on phase sensitive detection technique. This system consists of a single-mode fiber pigtailed laser diode, a corner cube, a position sensitive detector (PSD), and electronic components1. The beam from single mode fiber is stable, which can be used as a datum for straightness error measurement after collimation. The PSD is used to receive the beam reflected by the corner cube. To eliminate the influence of background light, the laser diode is modulated by a sinusoidal wave current and phase sensitive detection technique is developed to demodulate the signal. Compared with a laser interferometer, the measurement accuracy is better than ±0.4 μm. A repeatability test is conducted to assess the system stability by measuring a stage three times, showing that the repeatability is better than 1 μm. This system can be easily assembled to measure straightness errors of a carriage in workshop. 1 μm. This system can be easily assembled to measure straightness errors of a carriage in workshop.

Paper Details

Date Published: 19 December 2013
PDF: 6 pages
Proc. SPIE 9046, 2013 International Conference on Optical Instruments and Technology: Optoelectronic Measurement Technology and Systems, 90460Y (19 December 2013); doi: 10.1117/12.2036576
Show Author Affiliations
Pei Huang, Tsinghua Univ. (China)
Yan Li, Tsinghua Univ. (China)
Haoyun Wei, Tsinghua Univ. (China)


Published in SPIE Proceedings Vol. 9046:
2013 International Conference on Optical Instruments and Technology: Optoelectronic Measurement Technology and Systems
Hwa-Yaw Tam; Kexin Xu; Hai Xiao; Jigui Zhu, Editor(s)

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