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Proceedings Paper

Two-dimensional scanning using two single-axis low-voltage PZT resonant micromirrors
Author(s): S. Gu-Stoppel; J. Janes; H. J. Quenzer; U. Hofmann; W. Benecke
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Paper Abstract

This paper presents designs and fabrication process of two single-axis PZT micromirrors with 1 mm diameter and 1.4 mm × 4 mm apertures, whose frequencies are 60 kHz and 17 kHz, respectively. These micromirrors achieve large optical scan angles of about 40° driven by 10 V rectangular pulses and show high Q-factors of more than 1000. The investigation on the long-term stability of a PZT driven micromirror has detected more than 100 Billion cycles. The combined results of experimental diagnostics and FEM analyses give rise to new designs iteratively leading to a larger deflection and appropriate frequencies, which are currently fabricated.

Paper Details

Date Published: 7 March 2014
PDF: 8 pages
Proc. SPIE 8977, MOEMS and Miniaturized Systems XIII, 897706 (7 March 2014); doi: 10.1117/12.2036565
Show Author Affiliations
S. Gu-Stoppel, Fraunhofer-Institut für Siliziumtechnologie (Germany)
J. Janes, Fraunhofer-Institut für Siliziumtechnologie (Germany)
H. J. Quenzer, Fraunhofer-Institut für Siliziumtechnologie (Germany)
U. Hofmann, Fraunhofer-Institut für Siliziumtechnologie (Germany)
W. Benecke, Fraunhofer-Institut für Siliziumtechnologie (Germany)

Published in SPIE Proceedings Vol. 8977:
MOEMS and Miniaturized Systems XIII
Wibool Piyawattanametha; Yong-Hwa Park, Editor(s)

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