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Proceedings Paper

Groove profile modification of convex blazed gratings by dip (spin) coating with photoresist
Author(s): Yu Cheng; Quan Liu; Jianhong Wu
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Paper Abstract

The Offner-like spectrometer, one most widely used hyperspectral imaging spectrometers, offers some advantages over other spectrometers used in pushbroom imaging spectrometry: low chromatic aberrations, a compact size with low optical distortion, and large numerical aperture. The standard Offner spectrometer is made of three spherical concentric elements-- two concave mirrors and one convex grating. Convex grating is the core part of Offner type hyper-spectral imager. Considering the difficulties in fabrication of small angles convex gratings by traditional ways, we propose a new method. The ion-beam-etching holographic grating is adopted to obtain the convex blazed gratings with blazed angle of 4°--5°, whose angle can be further reduced by dipping or spinning coating with hardenable liquids. A highly reproducible blaze angle reduction to as high as a factor of 3 is achieved by controlling the spinning speed and viscosity of solution. The precise control of the blaze angles and groove profiles will be further studied focusing on the designing of rotate dip equipment and optimization of pulling speed and viscosity of solution.

Paper Details

Date Published: 21 December 2013
PDF: 9 pages
Proc. SPIE 9047, 2013 International Conference on Optical Instruments and Technology: Micro/Nano Photonics and Fabrication, 90470C (21 December 2013); doi: 10.1117/12.2036521
Show Author Affiliations
Yu Cheng, Soochow Univ. (China)
Quan Liu, Soochow Univ. (China)
Jianhong Wu, Soochow Univ. (China)

Published in SPIE Proceedings Vol. 9047:
2013 International Conference on Optical Instruments and Technology: Micro/Nano Photonics and Fabrication
Zhiping Zhou; Changhe Zhou; Zhiping Zhou, Editor(s)

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