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Proceedings Paper

Diamond-like film deposition by laser-initiated dissociation of benzol vapor
Author(s): Valerie A. Astapenko; Oleg E. Sidoryuk; Elena Ushanova
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Paper Abstract

A new method of diamond-like film deposition using laser-initiated discharge of benzol vapor is described. The investigation of the discharge parameters was carried out. Dependence of these parameters on characteristics of laser radiation, electric field, and vapor pressure was obtained. It has been shown that this method allows us to produce the coatings with low optical absorption.

Paper Details

Date Published: 1 March 1995
PDF: 3 pages
Proc. SPIE 2498, Laser Methods of Surface Treatment and Modification: ALT '94 International Conference, (1 March 1995); doi: 10.1117/12.203638
Show Author Affiliations
Valerie A. Astapenko, Moscow Institute of Physics and Technology (Russia)
Oleg E. Sidoryuk, Polus Research Institute (Russia)
Elena Ushanova, Polus Research Institute (Russia)


Published in SPIE Proceedings Vol. 2498:
Laser Methods of Surface Treatment and Modification: ALT '94 International Conference
Alexander M. Prokhorov; Vladimir I. Pustovoy, Editor(s)

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