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Proceedings Paper

Laser-induced etching and deposition of tungsten in tungstenhexafluoride-hydrogen atmosphere
Author(s): K. Piglmayer; Zsolt Toth; Zoltan Kantor
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Paper Abstract

Combined thermally induced etching and deposition of W in a mixture of WF6 and H2 is investigated by local laser-induced patterning of thin tungsten layers on quartz. The process divides into areas of pure etching and deposition, depending on the partial pressures of the gases.

Paper Details

Date Published: 1 March 1995
PDF: 6 pages
Proc. SPIE 2498, Laser Methods of Surface Treatment and Modification: ALT '94 International Conference, (1 March 1995); doi: 10.1117/12.203636
Show Author Affiliations
K. Piglmayer, Johannes-Kepler-Univ. Linz (Hungary)
Zsolt Toth, Johannes-Kepler-Univ. Linz (Hungary)
Zoltan Kantor, Johannes-Kepler-Univ. Linz (Hungary)


Published in SPIE Proceedings Vol. 2498:
Laser Methods of Surface Treatment and Modification: ALT '94 International Conference
Alexander M. Prokhorov; Vladimir I. Pustovoy, Editor(s)

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