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Proceedings Paper

Practical excimer laser-assisted cleaning of solid surfaces
Author(s): Hee K. Park; Constantine P. Grigoropoulos; Andrew C. Tam
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Paper Abstract

Pulsed-laser irradiation on a solid surface induces a highly efficient surface cleaning of submicron-sized particulates and undesirable organic overcoat films. The nanosecond-pulsed UV laser irradiation, shortly after the deposition of a thin liquid film on the surface, induces rapid vaporization of the liquid film and removal of particulates (`steam cleaning'). The laser beam also causes ablative photodecomposition of organic film contaminants on the surface (`dry cleaning'). A laser cleaning tool is constructed with an aim toward practical use based on an industrial grade KrF excimer laser. The tool includes a computer-controlled laser beam scanning system and a stable liquid film deposition unit, providing a cleaning rate of over 200 cm2/min. The cleaning strategy and the physical mechanisms of the laser cleaning techniques are also studied.

Paper Details

Date Published: 1 March 1995
PDF: 10 pages
Proc. SPIE 2498, Laser Methods of Surface Treatment and Modification: ALT '94 International Conference, (1 March 1995); doi: 10.1117/12.203633
Show Author Affiliations
Hee K. Park, Univ. of California/Berkeley (United States)
Constantine P. Grigoropoulos, Univ. of California/Berkeley (United States)
Andrew C. Tam, IBM Almaden Research Ctr. (United States)

Published in SPIE Proceedings Vol. 2498:
Laser Methods of Surface Treatment and Modification: ALT '94 International Conference
Alexander M. Prokhorov; Vladimir I. Pustovoy, Editor(s)

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