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Proceedings Paper

Investigation of temperature characteristic of MEMS-based optical fiber pressure sensor
Author(s): Jinde Yin; Tiegen Liu; Junfeng Jiang; Kun Liu; Shuang Wang; Bofu Zhao; Lei Xue; Yunqiao Mei; Yi Pu; Jishou Yin; Zunqi Qin; Shengliang Zou
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Paper Abstract

We fabricated MEMS-based optical fiber pressure sensor with anodic bonding. The vacuum-sealed microcavity with a thin silicon diaphragm is used as sensing element and its deformation characteristics determine the pressure measurement performance. Considering residual gas inside Fabry-Perot cavity and the thermal properties of material, we established a sensor’s temperature response mathematical model based on ideal gas equation and elastic theory. Temperature experiment of this sensor was carried out under vacuum. This work will provide a guide of temperature compensation process for achieving high precision pressure measurement.

Paper Details

Date Published: 20 December 2013
PDF: 7 pages
Proc. SPIE 9044, 2013 International Conference on Optical Instruments and Technology: Optical Sensors and Applications, 90440B (20 December 2013); doi: 10.1117/12.2036262
Show Author Affiliations
Jinde Yin, Tianjin Univ. (China)
Tiegen Liu, Tianjin Univ. (China)
Junfeng Jiang, Tianjin Univ. (China)
Kun Liu, Tianjin Univ. (China)
Shuang Wang, Tianjin Univ. (China)
Bofu Zhao, AVIC Chengdu CAIC Electronics Co., Ltd. (China)
Lei Xue, AVIC Chengdu CAIC Electronics Co., Ltd. (China)
Yunqiao Mei, AVIC Chengdu CAIC Electronics Co., Ltd. (China)
Yi Pu, AVIC Chengdu CAIC Electronics Co., Ltd. (China)
Jishou Yin, AVIC Chengdu CAIC Electronics Co., Ltd. (China)
Zunqi Qin, Tianjin Univ. (China)
Shengliang Zou, Tianjin Univ. (China)


Published in SPIE Proceedings Vol. 9044:
2013 International Conference on Optical Instruments and Technology: Optical Sensors and Applications
Brian Culshaw; Xuping Zhang; Anbo Wang, Editor(s)

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