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Proceedings Paper

Experimental study on SPDT machining of Gallium Phosphide
Author(s): J. Vaclavík; R. Doleček; V. Lédl; P. Psota
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Paper Abstract

Gallium Phosphide (GaP) is widely used semiconductor material, but can be also used as a material for visible and infrared optical elements. Combination of its optical and mechanical properties such as high mechanical durability, transparency from visible to infrared wavelengths and high refractive index makes it very interesting material for design of high performance optical systems in NIR and MWIR. Manufacturing of optical elements for such wavelength ranges is shifting from traditional grinding and polishing techniques to a more versatile SPDT machining. It is therefore useful to employ SPDT in production of optical surfaces on GaP. As the GaP is similar to GaAs, but harder and more brittle, all all the problems already known for GaAs are present. Here we report results of experiments with SPDT machining of optical surfaces on GaP substrates and comparison with classical machining methods.

Paper Details

Date Published: 15 October 2013
PDF: 12 pages
Proc. SPIE 8884, Optifab 2013, 88842H (15 October 2013); doi: 10.1117/12.2036139
Show Author Affiliations
J. Vaclavík, Institute of Plasma Physics of the ASCR, v.v.i. (Czech Republic)
R. Doleček, Institute of Plasma Physics of the ASCR, v.v.i. (Czech Republic)
V. Lédl, Institute of Plasma Physics of the ASCR, v.v.i. (Czech Republic)
P. Psota, Institute of Plasma Physics of the ASCR, v.v.i. (Czech Republic)


Published in SPIE Proceedings Vol. 8884:
Optifab 2013
Julie L. Bentley; Matthias Pfaff, Editor(s)

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