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Proceedings Paper

Laser-annealed deep ohmic contacts
Author(s): Petr Machac; Vladimir Myslik; Martin Vrnata
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Paper Abstract

The contribution deals with the results of our work on ohmic contact formation, the process optimization. The contacts should be optimized with respect to chemical composition of metallization, energy density of laser radiation, and repetition rate of laser pulses. These contacts also enable us to interconnect the surface of the samples with a very thin layer under the surface ((delta) -doped layer).

Paper Details

Date Published: 1 March 1995
PDF: 7 pages
Proc. SPIE 2498, Laser Methods of Surface Treatment and Modification: ALT '94 International Conference, (1 March 1995); doi: 10.1117/12.203613
Show Author Affiliations
Petr Machac, Institute of Chemical Technology (Czech Republic)
Vladimir Myslik, Institute of Chemical Technology (Czech Republic)
Martin Vrnata, Institute of Chemical Technology (Czech Republic)


Published in SPIE Proceedings Vol. 2498:
Laser Methods of Surface Treatment and Modification: ALT '94 International Conference
Alexander M. Prokhorov; Vladimir I. Pustovoy, Editor(s)

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