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Proceedings Paper

Deposition of thin polymer films by pulsed excimer laser ablation
Author(s): Martin Metal; Vladimir Myslik; Miroslav Jelinek
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Paper Abstract

Deposition of thin Polytetrafluorethylene (PTFE) film by laser ablation deposition (LAD) technique is briefly described. The method utilization, transport conditions, and optimal setup are presented. The paper also deals with the methods of prepared thin films characterization (scanning electron microscopy, x-ray diffraction, and Fourier transform infrared spectroscopy) and comments on all data achieved from all characterization measurements.

Paper Details

Date Published: 1 March 1995
PDF: 4 pages
Proc. SPIE 2498, Laser Methods of Surface Treatment and Modification: ALT '94 International Conference, (1 March 1995); doi: 10.1117/12.203612
Show Author Affiliations
Martin Metal, Institute of Chemical Technology (Czech Republic)
Vladimir Myslik, Institute of Chemical Technology (Czech Republic)
Miroslav Jelinek, Institute of Chemical Technology (Czech Republic)


Published in SPIE Proceedings Vol. 2498:
Laser Methods of Surface Treatment and Modification: ALT '94 International Conference
Alexander M. Prokhorov; Vladimir I. Pustovoy, Editor(s)

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