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Proceedings Paper

Processing parameters influence on structural properties of PZT layers deposited by pulsed laser deposition (PLD)
Author(s): V. Trtik; Miroslav Jelinek; Lubomir Jastrabik
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Paper Abstract

Ferroelectric thin film of Pb(Zr0.48Ti0.52)O3 (PZT) was deposited on lattice mismatched (0001)sapphire for substrate temperatures Tg in the region from 470 to 590 degree(s)C and oxygen pressure of 200 and 900 mTorr. Structural properties were characterized by XRD. Improvement of XRD patterns of deposited films with post-annealing temperature of the furnace was studied. The development of the plasma plume shape from PZT target under changing deposition conditions was investigated by CCD camera. Results show strong dependence of plume shape with oxygen pressure and laser beam spot size.

Paper Details

Date Published: 1 March 1995
PDF: 5 pages
Proc. SPIE 2498, Laser Methods of Surface Treatment and Modification: ALT '94 International Conference, (1 March 1995); doi: 10.1117/12.203611
Show Author Affiliations
V. Trtik, Institute of Physics (Czech Republic)
Miroslav Jelinek, Institute of Physics (Czech Republic)
Lubomir Jastrabik, Institute of Physics (Czech Republic)


Published in SPIE Proceedings Vol. 2498:
Laser Methods of Surface Treatment and Modification: ALT '94 International Conference
Alexander M. Prokhorov; Vladimir I. Pustovoy, Editor(s)

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