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Proceedings Paper

Automated surface profile measurement of diamond grid disk by phase-shifted shadow Moiré
Author(s): Terry Y. Chen; Jie Lin
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Proc. SPIE 8916, Sixth International Symposium on Precision Mechanical Measurements, ; doi: 10.1117/12.2035963
Show Author Affiliations
Terry Y. Chen, National Cheng Kung Univ. (Taiwan, China)
Jie Lin, National Cheng Kung Univ (Taiwan)


Published in SPIE Proceedings Vol. 8916:
Sixth International Symposium on Precision Mechanical Measurements
Shenghua Ye; Yetai Fei, Editor(s)

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