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Proceedings Paper

Multi-beam synchronous measurement based on PSD phase detection using frequency-domain multiplexing
Author(s): Ying Duan; Lan Qin; Lian Xue; Feng Xi; Jiubing Mao
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Paper Abstract

According to the principle of centroid measurement, position-sensitive detectors (PSD) are commonly used for micro displacement detection. However, single-beam detection method cannot satisfy such tasks as multi-dimension position measurement, three dimension vision reconstruction, and robot precision positioning, which require synchronous measurement of multiple light beams. Consequently, we designed PSD phase detection method using frequency-domain multiplexing for synchronous detection of multiple modulated light beams. Compared to previous PSD amplitude detection method, the phase detection method using FDM has advantages of simplified measuring system, low cost, high capability of resistance to light interference as well as improved resolution. The feasibility of multi-beam synchronous measurement based on PSD phase detection using FDM was validated by multi-beam measuring experiments. The maximum non-linearity error of the multi-beam synchronous measurement is 6.62%.

Paper Details

Date Published: 10 October 2013
PDF: 8 pages
Proc. SPIE 8916, Sixth International Symposium on Precision Mechanical Measurements, 89163C (10 October 2013); doi: 10.1117/12.2035899
Show Author Affiliations
Ying Duan, Chongqing Univ. (China)
Lan Qin, Chongqing Univ. (China)
Lian Xue, Chongqing Univ. (China)
Feng Xi, Chongqing Univ. (China)
Jiubing Mao, Chongqing Univ. (China)

Published in SPIE Proceedings Vol. 8916:
Sixth International Symposium on Precision Mechanical Measurements
Shenghua Ye; Yetai Fei, Editor(s)

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