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Proceedings Paper

Elastic mechanism design of a CMM contact probe
Author(s): Rui-Jun Li; Kuang-Chao Fan; Hao Zhou; Na Wang; Qiang-xian Huang
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Paper Abstract

The measurement of miniature components with a micro- or nano-coordinate measuring machine requires a high precision contact scanning probe. The elastic mechanism of low stiffness is a major component of the contact scanning probe. A new elastic mechanism is analyzed by the theory of elasticity and finite element analysis in this paper. It is to realize the probe’s mechanical behavior and stiffness when designing an elastic mechanism for a contact scanning probe. The contact scanning probe is composed of a tungsten stylus with a ruby ball tip, a mechanism of floating plate suspended by four V-shaped leaf springs, and a 3D optical sensor. The leaf spring experiences elastic deformation when a contact force is applied. Uniform stiffness model is analyzed. Simulation and experimental results verify the correctness of the analysis.

Paper Details

Date Published: 10 October 2013
PDF: 10 pages
Proc. SPIE 8916, Sixth International Symposium on Precision Mechanical Measurements, 89160P (10 October 2013); doi: 10.1117/12.2035794
Show Author Affiliations
Rui-Jun Li, Hefei Univ. of Technology (China)
Anhui Electrical Engineering Professional Technique College (China)
Kuang-Chao Fan, Hefei Univ. of Technology (China)
National Taiwan Univ. (Taiwan, China)
Hao Zhou, Hefei Univ. of Technology (China)
Na Wang, Hefei Univ. of Technology (China)
Qiang-xian Huang, Hefei Univ. of Technology (China)


Published in SPIE Proceedings Vol. 8916:
Sixth International Symposium on Precision Mechanical Measurements
Shenghua Ye; Yetai Fei, Editor(s)

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