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Proceedings Paper

Simulation and signal analysis of Akiyama probe applied to atomic force microscope
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Paper Abstract

Atomic force microscope is one of indispensable measurement tools in nano/micronano precision manufacture and critical dimension measurement. To expand its industry application, a novel head and system are newly designed combined with Nanosensors cooperation’s patented probe — Akiyama probe, which is a self-sensing probe. The modal analysis and resonance frequency are obtained by finite element(FE) simulations. Using the Locked-in amplifier, the effective and available signal can be abtained. Through the experiment analysis, the retracting and extending curve reflects the tip and sample interaction. Furthermore, the measurement on the calibrated position system demonstrates that the whole system resolution can reach the nanometer scale.

Paper Details

Date Published: 10 October 2013
PDF: 10 pages
Proc. SPIE 8916, Sixth International Symposium on Precision Mechanical Measurements, 89160W (10 October 2013); doi: 10.1117/12.2035726
Show Author Affiliations
Longlong Wang, Tianjin Univ. (China)
Mingzhen Lu, National Institute of Metrology (China)
Tong Guo, Tianjin Univ. (China)
Sitian Gao, National Institute of Metrology (China)
Huakun Zhang, National Institute of Metrology (China)


Published in SPIE Proceedings Vol. 8916:
Sixth International Symposium on Precision Mechanical Measurements
Shenghua Ye; Yetai Fei, Editor(s)

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