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Proceedings Paper

Error analysis and modeling for the time grating length measurement system
Author(s): Zhonghua Gao; Jiqin Fen; Fangyan Zheng; Ziran Chen; Donglin Peng; Xiaokang Liu
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Paper Abstract

Through analyzing errors of the length measurement system in which a linear time grating was the principal measuring component, we found that the study on the error law was very important to reduce system errors and optimize the system structure. Mainly error sources in the length measuring system, including the time grating sensor, slide way, and cantilever, were studied; and therefore total errors were obtained. Meanwhile we erected the mathematic model of errors of the length measurement system. Using the error model, we calibrated system errors being in the length measurement system. Also, we developed a set of experimental devices in which a laser interferometer was used to calibrate the length measurement system errors. After error calibrating, the accuracy of the measurement system was improved from original 36um/m to 14um/m. The fact that experiment results are consistent with the simulation results shows that the error mathematic model is suitable for the length measuring system.

Paper Details

Date Published: 10 October 2013
PDF: 7 pages
Proc. SPIE 8916, Sixth International Symposium on Precision Mechanical Measurements, 89163J (10 October 2013); doi: 10.1117/12.2035697
Show Author Affiliations
Zhonghua Gao, Chongqing Univ. of Technology (China)
Jiqin Fen, Chongqing Univ. of Technology (China)
Fangyan Zheng, Chongqing Univ. of Technology (China)
Ziran Chen, Chongqing Univ. of Technology (China)
Donglin Peng, Chongqing Univ. of Technology (China)
Xiaokang Liu, Chongqing Univ. of Technology (China)

Published in SPIE Proceedings Vol. 8916:
Sixth International Symposium on Precision Mechanical Measurements
Shenghua Ye; Yetai Fei, Editor(s)

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