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Proceedings Paper

Research status and developing trends of grating nanometer measuring technology
Author(s): Minlan Jiang; Huifeng Li; Xiaodong Wang; Jianguo Shen
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Paper Abstract

Along with the progress of rating and signal processing technology, because of its advantages and wide application, grating measuring technology has become a research hotspot in the precision measuring field. Nanometer measuring has become urgently to solve problem with the need of industrial development and scientific research from sub micrometer to nanometer precision measurement. This paper systematically discusses its research status, existing problems, developing trends and other issues about grating nanometer measuring technology. It provides references to grating nanometer measuring technology researches and its development.

Paper Details

Date Published: 10 October 2013
PDF: 6 pages
Proc. SPIE 8916, Sixth International Symposium on Precision Mechanical Measurements, 891631 (10 October 2013); doi: 10.1117/12.2035685
Show Author Affiliations
Minlan Jiang, Zhejiang Normal Univ. (China)
Huifeng Li, Zhejiang Normal Univ. (China)
Xiaodong Wang, Zhejiang Normal Univ. (China)
Jianguo Shen, Zhejiang Normal Univ. (China)


Published in SPIE Proceedings Vol. 8916:
Sixth International Symposium on Precision Mechanical Measurements
Shenghua Ye; Yetai Fei, Editor(s)

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