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Front Matter: Volume 8880

Paper Abstract

This PDF file contains the front matter associated with SPIE Proceedings Volume 8880, including the Title Page, Copyright information, Table of Contents, Invited Panel Discussion, and Conference Committee listing.

Paper Details

Date Published: 9 October 2013
PDF: 18 pages
Proc. SPIE 8880, Photomask Technology 2013, 888001 (9 October 2013); doi: 10.1117/12.2035650
Show Author Affiliations

Published in SPIE Proceedings Vol. 8880:
Photomask Technology 2013
Thomas B. Faure; Paul W. Ackmann, Editor(s)

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