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Proceedings Paper

Full-field x-ray nano-imaging at SSRF
Author(s): Biao Deng; Yuqi Ren; Yudan Wang; Guohao Du; Honglan Xie; Tiqiao Xiao
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Paper Abstract

Full field X-ray nano-imaging focusing on material science is under developing at SSRF. A dedicated full field X-ray nano-imaging beamline based on bending magnet will be built in the SSRF phase-II project. The beamline aims at the 3D imaging of the nano-scale inner structures. The photon energy range is of 5-14keV. The design goals with the field of view (FOV) of 20μm and a spatial resolution of 20nm are proposed at 8 keV, taking a Fresnel zone plate (FZP) with outermost zone width of 25 nm. Futhermore, an X-ray nano-imaging microscope is under developing at the SSRF BL13W beamline, in which a larger FOV will be emphasized. This microscope is based on a beam shaper and a zone plate using both absorption contrast and Zernike phase contrast, with the optimized energy set to 10keV. The detailed design and the progress of the project will be introduced.

Paper Details

Date Published: 26 September 2013
PDF: 6 pages
Proc. SPIE 8851, X-Ray Nanoimaging: Instruments and Methods, 88511D (26 September 2013); doi: 10.1117/12.2035589
Show Author Affiliations
Biao Deng, Shanghai Institute of Applied Physics (China)
Yuqi Ren, Shanghai Institute of Applied Physics (China)
Yudan Wang, Shanghai Institute of Applied Physics (China)
Guohao Du, Shanghai Institute of Applied Physics (China)
Honglan Xie, Shanghai Institute of Applied Physics (China)
Tiqiao Xiao, Shanghai Institute of Applied Physics (China)

Published in SPIE Proceedings Vol. 8851:
X-Ray Nanoimaging: Instruments and Methods
Barry Lai, Editor(s)

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