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Proceedings Paper

Towards superfast 3D optical metrology with digital micromirror device (DMD) platforms
Author(s): Tyler Bell; Song Zhang
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Paper Abstract

This paper summarizes our decade-long research efforts towards superfast 3D shape measurement leveraging the digital micromirror device (DMD) platforms. Specifically, we will present the following technologies: (1) high-resolution real-time 3D shape measurement technology that achieves 30 Hz simultaneous 3D shape acquisition, reconstruction and display with more than 300,000 points per frame; (2) Superfast 3D optical metrology technology that achieves 3D measurement at a rate of tens of kHz utilizing the binary defocusing method we invented; and (3) the improvement of the binary defocusing technology for superfast and high-accuracy 3D optical metrology using the DMD platforms. This paper will present both principles and experimental results.

Paper Details

Date Published: 7 March 2014
PDF: 11 pages
Proc. SPIE 8979, Emerging Digital Micromirror Device Based Systems and Applications VI, 897907 (7 March 2014); doi: 10.1117/12.2035270
Show Author Affiliations
Tyler Bell, Iowa State Univ. (United States)
Song Zhang, Iowa State Univ. (United States)


Published in SPIE Proceedings Vol. 8979:
Emerging Digital Micromirror Device Based Systems and Applications VI
Michael R. Douglass; Philip S. King; Benjamin L. Lee, Editor(s)

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