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Proceedings Paper

Laser-assisted deposition of TiN and TiC coatings
Author(s): O. Conde; M. L.F. Parames; A. J. Silvestre
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Paper Abstract

In this paper we present results on the deposition of titanium nitride and titanium carbide films by pyrolytic laser-induced chemical vapor deposition using a cw TEM00 CO2 laser beam. TiN lines were deposited onto mild steel substrates while TiC spots were deposited on silica substrates. The microstructure of the surface and of fractured cross-sections of the films were examined by scanning electron microscopy. The topography of the films and the thickness measurements were studied both with diamond-stylus and non-contact laser profilometers. The chemical composition of the TiN films was investigated by electron probe microanalysis. X-ray diffraction was used for phase and structure analyses of the TiC films.

Paper Details

Date Published: 8 March 1995
PDF: 8 pages
Proc. SPIE 2461, ROMOPTO '94: Fourth Conference in Optics, (8 March 1995); doi: 10.1117/12.203521
Show Author Affiliations
O. Conde, Univ. of Lisbon (Portugal)
M. L.F. Parames, Univ. of Lisbon (Portugal)
A. J. Silvestre, Univ. of Lisbon (Portugal)

Published in SPIE Proceedings Vol. 2461:
ROMOPTO '94: Fourth Conference in Optics
Valentin I. Vlad, Editor(s)

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