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Proceedings Paper

Buried picolitre fluidic channels in single-crystal diamond
Author(s): Michelle A. Strack; Barbara A. Fairchild; Andrew D. C. Alves; Philipp Senn; Brant C. Gibson; Steven Prawer; Andrew D. Greentree
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Paper Abstract

We report the generation of sub-surface nanouidic channels from single crystal diamond. To make the channels, we used a combination of ion-beam induced damage and annealing to create a buried, etchable graphitic layer in the diamond. Either laser or focussed ion-beam milling was then used to connect to that layer, and subsequent electro-chemical etching used to remove the graphitic material. The channels had dimensions 100-200 nm thick, 100 μm wide and 300 μm long, which have a total volume around 3 pL; and were around 3 μm below the diamond surface.

Paper Details

Date Published: 20 December 2013
PDF: 6 pages
Proc. SPIE 8923, Micro/Nano Materials, Devices, and Systems, 89232X (20 December 2013); doi: 10.1117/12.2035099
Show Author Affiliations
Michelle A. Strack, The Univ. of Melbourne (Australia)
Barbara A. Fairchild, The Univ. of Melbourne (Australia)
Andrew D. C. Alves, The Univ. of Melbourne (Australia)
Philipp Senn, The Univ. of Melbourne (Australia)
Bionics Institute (Australia)
Brant C. Gibson, The Univ. of Melbourne (Australia)
RMIT Univ. (Australia)
Steven Prawer, The Univ. of Melbourne (Australia)
Andrew D. Greentree, RMIT Univ. (Australia)

Published in SPIE Proceedings Vol. 8923:
Micro/Nano Materials, Devices, and Systems
James Friend; H. Hoe Tan, Editor(s)

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