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Proceedings Paper

A versatile instrumentation system for MEMS-based device optical characterization
Author(s): Ramin Rafiei; Robert W. Basedow; K. K. M. B. Dilusha Silva; Jega T. Gurusamy; Jorge R. Silva Castillo; Dhirendra K. Tripathi; John M. Dell; Lorenzo Faraone
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Paper Abstract

Future improvements in spectral imaging systems can be attained through the integration of MEMS-based optical transmission devices matched with pixelated arrays. Such integrated module designs will require a detailed knowledge of the MEMS device optical properties at high spatial resolution and over a wide range of operating conditions. A substantially automated low-cost optical characterization system has been developed, which enables the optical transmission of the MEMS device be measured with high spatial and spectral precision. This Optical Metrology System (OMS) can focus light on the device under test (DUT) to a spot diameter of less than 30 μm, and characterize devices at near infrared for wavelengths within the spectral band from 1.4 μm to 2.6 μm. A future upgrade to the OMS will enable measurements to be carried out across a wide range of DUT temperatures and with a spectral range from visible to long wave infrared wavelengths.

Paper Details

Date Published: 7 December 2013
PDF: 9 pages
Proc. SPIE 8923, Micro/Nano Materials, Devices, and Systems, 89232V (7 December 2013); doi: 10.1117/12.2034955
Show Author Affiliations
Ramin Rafiei, The Univ. of Western Australia (Australia)
Robert W. Basedow, The Univ. of Western Australia (Australia)
K. K. M. B. Dilusha Silva, The Univ. of Western Australia (Australia)
Jega T. Gurusamy, The Univ. of Western Australia (Australia)
Jorge R. Silva Castillo, The Univ. of Western Australia (Australia)
Dhirendra K. Tripathi, The Univ. of Western Australia (Australia)
John M. Dell, The Univ. of Western Australia (Australia)
Lorenzo Faraone, The Univ. of Western Australia (Australia)

Published in SPIE Proceedings Vol. 8923:
Micro/Nano Materials, Devices, and Systems
James Friend; H. Hoe Tan, Editor(s)

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