Share Email Print
cover

Proceedings Paper

Modern technologies for optical components with special dimensions
Author(s): Teodor Necsoiu; Roxana N. Radvan; Roxana Savastru; Dan Savastru; Eugene O. Curatu
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

The paper proposes an optical arrangement for the control in real-time of the laser spot position in lithography techniques. The arrangement is adequately for the small installation, especially used in research or teaching activities.

Paper Details

Date Published: 8 March 1995
PDF: 3 pages
Proc. SPIE 2461, ROMOPTO '94: Fourth Conference in Optics, (8 March 1995); doi: 10.1117/12.203494
Show Author Affiliations
Teodor Necsoiu, Institute of Optoelectronics (Romania)
Roxana N. Radvan, Institute of Optoelectronics (Romania)
Roxana Savastru, Institute of Optoelectronics (Romania)
Dan Savastru, Institute of Optoelectronics (Romania)
Eugene O. Curatu, Politehnica Univ. of Bucharest (Romania)


Published in SPIE Proceedings Vol. 2461:
ROMOPTO '94: Fourth Conference in Optics
Valentin I. Vlad, Editor(s)

© SPIE. Terms of Use
Back to Top