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Proceedings Paper

Error analysis for aspheric surface testing system
Author(s): Jie Feng; Chao Deng; Tingwen Xing
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Paper Abstract

Computer-generated holograms (CGHs) are commonly used in optical interferometry for producing reference wavefronts with desired shapes. Uncertainties from the computer generated hologram (CGH) manufacturing processes produce errors in the finished hologram and the generated reference wavefront. CGH errors compromise the accuracy of the interferometric measurements. Although errors in the CGHs may be introduced during either the design or the fabrication process, fabrication uncertainties are mostly responsible for the degradation of the quality of CGHs. To specify and verify detection accuracy of aspheric surface testing system, alignment errors and fabrication errors of the CGHs will be analyzed. Methods are discussed for measuring the fabrication errors in the CGH substrate, duty cycle, etching depth, and effect of surface roughness. An example analysis of the wavefront errors from fabrication nonuniformities for a phase CGH is given.

Paper Details

Date Published: 23 August 2013
PDF: 10 pages
Proc. SPIE 8911, International Symposium on Photoelectronic Detection and Imaging 2013: Micro/Nano Optical Imaging Technologies and Applications, 89110V (23 August 2013); doi: 10.1117/12.2034884
Show Author Affiliations
Jie Feng, Institute of Optics and Electronics (China)
Univ. of the Chinese Academy of Sciences (China)
Chao Deng, Institute of Optics and Electronics (China)
Tingwen Xing, Institute of Optics and Electronics (China)


Published in SPIE Proceedings Vol. 8911:
International Symposium on Photoelectronic Detection and Imaging 2013: Micro/Nano Optical Imaging Technologies and Applications
Min Gu; Xiaocong Yuan; Min Qiu, Editor(s)

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