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Proceedings Paper

A data processing method based on tracking light spot for the laser differential confocal component parameters measurement system
Author(s): Rongjun Shao; Lirong Qiu; Jiamiao Yang; Weiqian Zhao; Xin Zhang
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Paper Abstract

We have proposed the component parameters measuring method based on the differential confocal focusing theory. In order to improve the positioning precision of the laser differential confocal component parameters measurement system (LDDCPMS), the paper provides a data processing method based on tracking light spot. To reduce the error caused by the light point moving in collecting the axial intensity signal, the image centroiding algorithm is used to find and track the center of Airy disk of the images collected by the laser differential confocal system. For weakening the influence of higher harmonic noises during the measurement, Gaussian filter is used to process the axial intensity signal. Ultimately the zero point corresponding to the focus of the objective in a differential confocal system is achieved by linear fitting for the differential confocal axial intensity data. Preliminary experiments indicate that the method based on tracking light spot can accurately collect the axial intensity response signal of the virtual pinhole, and improve the anti-interference ability of system. Thus it improves the system positioning accuracy.

Paper Details

Date Published: 23 December 2013
PDF: 8 pages
Proc. SPIE 9043, 2013 International Conference on Optical Instruments and Technology: Optoelectronic Devices and Optical Signal Processing, 90430L (23 December 2013); doi: 10.1117/12.2034881
Show Author Affiliations
Rongjun Shao, Beijing Institute of Technology (China)
Lirong Qiu, Beijing Institute of Technology (China)
Jiamiao Yang, Beijing Institute of Technology (China)
Weiqian Zhao, Beijing Institute of Technology (China)
Xin Zhang, Beijing Institute of Technology (China)


Published in SPIE Proceedings Vol. 9043:
2013 International Conference on Optical Instruments and Technology: Optoelectronic Devices and Optical Signal Processing
Yi Dong; Xiaoyi Bao; Chao Lu; Xiangjun Xin; Xuping Zhang, Editor(s)

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