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Proceedings Paper

Non-digitized diffractive beam splitters for high-throughput laser materials processing
Author(s): J. Amako; E. Fujii
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Paper Abstract

We report a non-digitized diffractive beam splitter with a split count of 45, a 95% splitting efficiency, and a 0.90 splitting uniformity. The splitter was iteratively designed and was created on fused silica by laser writing lithography. Antireflection coatings were added to the splitter to ensure high efficiency. This splitter was applied to the manufacture of inkjet printer heads, in which silicon wafers were drilled with a 532-nm, nanosecond pulse laser with an average output of 10 W and were wet-etched to produce microfluidic channels. We also discuss large beam arrays for process throughput and subwavelength structures formed on the splitter for efficient laser power use.

Paper Details

Date Published: 6 March 2014
PDF: 8 pages
Proc. SPIE 8968, Laser-based Micro- and Nanoprocessing VIII, 896807 (6 March 2014); doi: 10.1117/12.2034598
Show Author Affiliations
J. Amako, Toyo Univ. (Japan)
E. Fujii, Seiko Epson Corp. (Japan)

Published in SPIE Proceedings Vol. 8968:
Laser-based Micro- and Nanoprocessing VIII
Udo Klotzbach; Kunihiko Washio; Craig B. Arnold, Editor(s)

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