Share Email Print

Proceedings Paper

Design of an optical system with large depth of field using in the micro-assembly
Author(s): Rong Li; Jun Chang; Zhi-jing Zhang; Xin Ye; Hai-jing Zheng
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

Micro system currently is the mainstream of application and demand of the field of micro fabrication of civilian and national defense. Compared with the macro assembly, the requirements on location accuracy of the micro-assembly system are much higher. Usually the dimensions of the components of the micro-assembly are mostly between a few microns to several hundred microns. The general assembly precision requires for the sub-micron level. Micro system assembly is the bottleneck of micro fabrication currently. The optical stereo microscope used in the field of micro assembly technology can achieve high-resolution imaging, but the depth of field of the optical imaging system is too small. Thus it’s not conducive to the three-dimensional observation process of the micro-assembly. This paper summarizes the development of micro system assembly at home and abroad firstly. Based on the study of the core features of the technology, a program is proposed which uses wave front coding technology to increase the depth of field of the optical imaging system. In the wave front coding technology, by combining traditional optical design with digital image processing creatively, the depth of field can be greatly increased, moreover, all defocus-related aberrations, such as spherical aberration, chromatic aberration, astigmatism, Ptzvel(field) curvature, distortion, and other defocus induced by the error of assembling and temperature change, can be corrected or minimized. In this paper, based on the study of theory, a set of optical microscopy imaging system is designed. This system is designed and optimized by optical design software CODE V and ZEMAX. At last, the imaging results of the traditional optical stereo microscope and the optical stereo microscope applied wave front coding technology are compared. The results show that: the method has a practical operability and the phase plate obtained by optimized has a good effect on improving the imaging quality and increasing the depth of field.

Paper Details

Date Published: 23 August 2013
PDF: 9 pages
Proc. SPIE 8911, International Symposium on Photoelectronic Detection and Imaging 2013: Micro/Nano Optical Imaging Technologies and Applications, 89110N (23 August 2013); doi: 10.1117/12.2034559
Show Author Affiliations
Rong Li, Beijing Institute of Technology (China)
Jun Chang, Beijing Institute of Technology (China)
Zhi-jing Zhang, Beijing Institute of Technology (China)
Xin Ye, Beijing Institute of Technology (China)
Hai-jing Zheng, Beijing Institute of Technology (China)

Published in SPIE Proceedings Vol. 8911:
International Symposium on Photoelectronic Detection and Imaging 2013: Micro/Nano Optical Imaging Technologies and Applications
Min Gu; Xiaocong Yuan; Min Qiu, Editor(s)

© SPIE. Terms of Use
Back to Top