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Proceedings Paper

Ultra-stable atomic force microscope with integrated laser inteferometry
Author(s): Jan Herrmann; Bakir Babic; Christopher H. Freund; Malcolm A. Lawn; Magnus T. L. Hsu; Terrgy G. McRae; Malcolm B. Gray; Victoria A. Coleman
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Paper Details

Date Published:
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Proc. SPIE 8923, Micro/Nano Materials, Devices, and Systems, 892326; doi: 10.1117/12.2033916
Show Author Affiliations
Jan Herrmann, National Measurement Institute of Australia (Australia)
Bakir Babic, National Measurement Institute of Australia (Australia)
Christopher H. Freund, National Measurement Institute of Australia (Australia)
Malcolm A. Lawn, National Measurement Institute of Australia (Australia)
Magnus T. L. Hsu, National Measurement Institute of Australia (Australia)
Terrgy G. McRae, National Measurement Institute of Australia (Australia)
Malcolm B. Gray, National Measurement Institute of Australia (Australia)
Victoria A. Coleman, National Measurement Institute of Australia (Australia)


Published in SPIE Proceedings Vol. 8923:
Micro/Nano Materials, Devices, and Systems
James Friend; H. Hoe Tan, Editor(s)

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