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Proceedings Paper

Effect of the subsidiary electrode in a newly developed source lens structure of the microcolumn
Author(s): Tae-Sik Oh; Dae-Wook Kim; Ho Seob Kim; Won Kweon Jang
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Paper Abstract

A subsidiary electrode was introduced between the extractor and anode in our newly developed source lens design of a micro electron column to improve the probe beam characteristics. At the same field enhancement factor of 3.95, the probe beam current showed a drastic increase compared to that of the conventional source lens structure. The design parameters of the newly developed source lens structure and the equipotential line distribution are presented with simulation results.

Paper Details

Date Published: 7 December 2013
PDF: 6 pages
Proc. SPIE 8923, Micro/Nano Materials, Devices, and Systems, 89234V (7 December 2013); doi: 10.1117/12.2033780
Show Author Affiliations
Tae-Sik Oh, Sun Moon Univ. (Korea, Republic of)
Dae-Wook Kim, Sun Moon Univ. (Korea, Republic of)
Ho Seob Kim, Sun Moon Univ. (Korea, Republic of)
Won Kweon Jang, Hanseo Univ. (Korea, Republic of)


Published in SPIE Proceedings Vol. 8923:
Micro/Nano Materials, Devices, and Systems
James Friend; H. Hoe Tan, Editor(s)

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