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Proceedings Paper

Fabrication of Fresnel zone plate lens in fused silica glass using femtosecond laser lithography technology
Author(s): Ik-Bu Sohn; Md. Shamim Ahsan; Young-Chul Noh; Hun-Kook Choi; Jin-Tae Kim; Myeong Jin Ko
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Paper Abstract

This paper demonstrates mask-less formation of Fresnel zone plate lens on the surface of a fused silica glass substrate using femtosecond laser lithography technology. The lens consists of a series of concentric rings, which has been fabricated on the glass surface by femtosecond laser writing followed by chemical etching and stripping. We also pattern Fresnel zone plate on fused silica glass surface using direct femtosecond laser writing technique. The both Fresnel zone plate lenses have a focal length of 50 mm. Femtosecond laser lithography technique offers smooth patterning of materials compared to traditional femtosecond laser writing. Consequently, femtosecond laser lithography induced Fresnel zone plate lens yields considerably high diffraction efficiency. Using these Fresnel zone plate lenses, we are able to observe the micro-letters, micro-machined on aluminum coated poly-methylmethacrylate (PMMA) surface indicating excellent focusing and imaging capability of the Fresnel zone plate lenses. The proposed mask-less technology is simple compared to other lithography techniques, which shows great potential for small-scale manufacturing of similar kinds of optical devices.

Paper Details

Date Published: 7 December 2013
PDF: 8 pages
Proc. SPIE 8923, Micro/Nano Materials, Devices, and Systems, 89233Y (7 December 2013); doi: 10.1117/12.2033766
Show Author Affiliations
Ik-Bu Sohn, Gwangju Institute of Science and Technology (Korea, Republic of)
Md. Shamim Ahsan, Gwangju Institute of Science and Technology (Korea, Republic of)
Khulna Univ. (Bangladesh)
Young-Chul Noh, Gwangju Institute of Science and Technology (Korea, Republic of)
Hun-Kook Choi, Chosun Univ. (Korea, Republic of)
Jin-Tae Kim, Chosun Univ. (Korea, Republic of)
Myeong Jin Ko, Korea Institute of Industrial Technology (Korea, Republic of)

Published in SPIE Proceedings Vol. 8923:
Micro/Nano Materials, Devices, and Systems
James Friend; H. Hoe Tan, Editor(s)

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