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Proceedings Paper

Long-wavelength infrared Fabry-Perot etalon for multi-spectral thermal imaging
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Paper Abstract

A miniature Fabry-Perot etalon was designed and fabricated to provide spectral filtering capability at the resonance wavelength of 10 μm. A high transmission peak of 85% and a relatively broad bandwidth of 500 nm are expected based on optical modeling. Optimal deposition conditions for process durable thin film materials were developed and optical constants of these materials were characterized. Fabrication of devices was accomplished using standard surface micromachining technique. Released mirrors exhibited a deflection of 400 nm over a length of 150 μm.

Paper Details

Date Published: 7 December 2013
PDF: 6 pages
Proc. SPIE 8923, Micro/Nano Materials, Devices, and Systems, 89234P (7 December 2013); doi: 10.1117/12.2033755
Show Author Affiliations
Haifeng Mao, The Univ. of Western Australia (Australia)
Adrian J. Keating, The Univ. of Western Australia (Australia)
Dilusha Silva, The Univ. of Western Australia (Australia)
John M. Dell, The Univ. of Western Australia (Australia)
Lorenzo Faraone, The Univ. of Western Australia (Australia)


Published in SPIE Proceedings Vol. 8923:
Micro/Nano Materials, Devices, and Systems
James Friend; H. Hoe Tan, Editor(s)

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