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Proceedings Paper

On-chip optical nano-scale displacement sensor
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Paper Abstract

In this paper, a high-speed on-chip optical displacement sensing and self-actuating mechanisms have been designed and simulated for an AFM application. This mechanism can allow significantly smaller cantilever beams to be made with higher sensitivity and wide bandwidth for parallel imaging through array of cantilevers. This arrangement consists of a Si-waveguide in which a nano-scale free space gap is fabricated in the direction of light propagation.One portion of the Si-waveguide is a suspended cantilever with a thin film PZT formed on it for actuation. The optical power coupling loss between the waveguides is used to measure the cantilever displacement. The simulation results show that the device can achieve a 6.25MHz resonant frequency in air, 0.195N/m spring constant and less than 0.1nm sensitivity. This approach can overcome the conventional cantilever size limit of an AFM to achieve high bandwidth with low spring constant.

Paper Details

Date Published: 7 December 2013
PDF: 8 pages
Proc. SPIE 8923, Micro/Nano Materials, Devices, and Systems, 89233Z (7 December 2013); doi: 10.1117/12.2033715
Show Author Affiliations
Peng Wang, The Univ. of New South Wales (Australia)
Aron Michael, The Univ. of New South Wales (Australia)
Chee Yee Kwok, The Univ. of New South Wales (Australia)

Published in SPIE Proceedings Vol. 8923:
Micro/Nano Materials, Devices, and Systems
James Friend; H. Hoe Tan, Editor(s)

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