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Proceedings Paper

Synthesis and characterization of ZnTe thin films on silicon by thermal-furnace evaporation
Author(s): Jenn-Sen Lin; Shih-Syun Wei; Yi-Ting Yu; Cheng-Hsing Hsu; Wen-Hua Kao; Wen-Shiush Chen; Ching-Fang Tseng; Chun-Hung Lai; Jian-Ming Lu; Shin-Pon Ju; Jin-Yuan Hsieh
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Paper Abstract

Zinc telluride (ZnTe) compound is one of the attractive elements of the II–VI group also having wide range of applications such as switching devices, light-emitting diode, solar cells and photodetectors. In this paper, the microstructure and electrical properties of znic telluride thin films were studied by using thermal-furnace evaporation with emphasis on the effects of argon pressure and deposition temperature. Crystallinity, mobility, carrier concentration and sheet resistance are shown to be dependent on the argon pressure and deposition temperature. The grain size was increased with increasing the annealing temperature and decreasing the argon pressure. The highest carrier concentration of 1.9×1016 cm-3, the lowest sheet resistance of 3180 Ω/ and the largest mobility of 5.1×103 cm2V-1S-1 are presented at an argon pressure of 100°sccm and a deposition temperature of 580°C, respectively.

Paper Details

Date Published: 20 August 2013
PDF: 7 pages
Proc. SPIE 8913, International Symposium on Photoelectronic Detection and Imaging 2013: Optical Storage and Display Technology, 89130K (20 August 2013); doi: 10.1117/12.2033133
Show Author Affiliations
Jenn-Sen Lin, National United Univ. (Taiwan)
Shih-Syun Wei, National United Univ. (Taiwan)
Yi-Ting Yu, National United Univ. (Taiwan)
Cheng-Hsing Hsu, National United Univ. (Taiwan)
Wen-Hua Kao, National United Univ. (Taiwan)
Wen-Shiush Chen, National United Univ. (Taiwan)
Ching-Fang Tseng, National United Univ. (Taiwan)
Chun-Hung Lai, National United Univ. (Taiwan)
Jian-Ming Lu, National Ctr. for High-Performance Computing (Taiwan)
Shin-Pon Ju, National Sun Yat-Sen Univ. (Taiwan)
Jin-Yuan Hsieh, Minghsin Univ. of Science and Technology (Taiwan)

Published in SPIE Proceedings Vol. 8913:
International Symposium on Photoelectronic Detection and Imaging 2013: Optical Storage and Display Technology
Changsheng Xie; Yikai Su; Liangcai Cao, Editor(s)

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