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Proceedings Paper

Effect of polishing plane vibration on large-size optical workpieces in continuous polishing
Author(s): Haiyang Shan; Chaoyang Wei; Xueke Xu; Hongbo He; Shijie Liu; Yingfeng Li; Kui Yi; Jianda Shao
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Paper Abstract

Effect of the polishing plane vibration on large-size optical workpieces in continuous polishing is studied. The vibration equation was deduced based on the existence of inclination between the polishing plane and z-axis direction. Influences of different parameters, such as the inclination, rotation speeds of the polishing plane and workpiece, the eccentricity and workpiece radius, on the polishing plane vibration were simulated. The simulations results show that rotation speeds of the polishing plane and workpiece is the most significant factor. The chaotic vibration of the polishing plane increases with increasing rotation speeds differences between the polishing plane and workpiece. When differences are small, periodic ups and downs of the polishing plane occur with the increase of polishing time. Experiments verified the influence of rotation speeds differences on the polishing plane vibration. The vibration affects PV of large-size optical workpieces in continuous polishing.

Paper Details

Date Published: 15 October 2013
PDF: 10 pages
Proc. SPIE 8884, Optifab 2013, 88841S (15 October 2013); doi: 10.1117/12.2032540
Show Author Affiliations
Haiyang Shan, Shanghai Institute of Optics and Fine Mechanics (China)
Univ. of Chinese Academy of Sciences (China)
Chaoyang Wei, Shanghai Institute of Optics and Fine Mechanics (China)
Xueke Xu, Shanghai Institute of Optics and Fine Mechanics (China)
Hongbo He, Shanghai Institute of Optics and Fine Mechanics (China)
Shijie Liu, Shanghai Institute of Optics and Fine Mechanics (China)
Yingfeng Li, Shanghai Institute of Optics and Fine Mechanics (China)
Kui Yi, Shanghai Institute of Optics and Fine Mechanics (China)
Jianda Shao, Shanghai Institute of Optics and Fine Mechanics (China)


Published in SPIE Proceedings Vol. 8884:
Optifab 2013
Julie L. Bentley; Matthias Pfaff, Editor(s)

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