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Proceedings Paper

Design and implementation of film coating for tunable liquid crystal Fabry-Perot filter working in mid-infrared spectral region
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Paper Abstract

In this paper, we design and implementation anti-reflection and high reflection film for tunable LC-FP filter working in typical medium wave infrared (MWIR) spectral region. As to reflection mirror, we complete it by depositing gold film on the silicon substrate. By using the analytical method of dividing amplitude multiple beam interference to simulate the reflectance, the reflectivity result of the gold film is around 98% at the average in the MWIR spectral region. When take the absorption of the gold film into consideration, the gold film should be thin under the condition that it is conductive well. The anti-reflection film is introduced to reduce the reflection of the other side of the wafer. In anti-reflection structure, we simulate the reflection of the films with the algorithm of the equivalent membrane and fulfill our design with the technology of vapor deposition. Finally, we test the total transmittance of the wafer deposited gold films and anti-reflection films, which is about 0.2% of single chip. By making use of the wafer designed by us, we fabricate the LC-FP filter by placing two wafers side by side with the anti-reflection structure face to the direction of wavelength incident. Simultaneously, the LC layer with fixed thickness is sealed between the two high reflection mirrors formed by gold film. Compared with other method to fabricate mid-infrared FP filter, deposition of reflection and anti-reflection films on wafer have the advantage of low cost, simple technology.

Paper Details

Date Published: 26 October 2013
PDF: 6 pages
Proc. SPIE 8917, MIPPR 2013: Multispectral Image Acquisition, Processing, and Analysis, 891708 (26 October 2013); doi: 10.1117/12.2032155
Show Author Affiliations
Huaidong Zhang, Huazhong Univ. of Science and Technology (China)
Anbang Fu, Huazhong Univ. of Science and Technology (China)
Xinyu Zhang, Huazhong Univ. of Science and Technology (China)
Hongshi Sang, Huazhong Univ. of Science and Technology (China)
Changsheng Xie, Huazhong Univ. of Science and Technology (China)

Published in SPIE Proceedings Vol. 8917:
MIPPR 2013: Multispectral Image Acquisition, Processing, and Analysis
Xinyu Zhang; Jianguo Liu, Editor(s)

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