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Proceedings Paper

Silicon nitride (SiNx) plasma deposition on optical fiber sensors: coating symmetry perspective
Author(s): Adrian Krysiński; Mateusz Śmietana; Robert Mroczyński; Norbert Kwietniewski; Wojtek J. Bock; Predrag Mikulic
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Paper Abstract

This paper discusses the influence of coating long-period gratings with a silicon nitride thin overlay on the grating’s spectral response. The overlays have been obtained with a radio frequency plasma enhanced chemical vapor deposition method. During the experiment, the structures were positioned on various heights over the electrode using specially developed sample holder. The results of the experiment show that the investigated long period grating structures have increased their sensitivity to variations of external medium refractive index in the range of nD=1.33 to 1.43 RIU. The relation between the height at which the long period grating was placed over the electrode and the deposited overlay symmetry is discussed. The highest sensitivity of 2080 nm/RIU has been observed for the grating placed at the highest positions of the holder out of the examined range of 3 to 8 mm over the electrode. This overlay also shows the highest symmetry around the fiber.

Paper Details

Date Published: 25 July 2013
PDF: 6 pages
Proc. SPIE 8902, Electron Technology Conference 2013, 89021P (25 July 2013); doi: 10.1117/12.2031844
Show Author Affiliations
Adrian Krysiński, Warsaw Univ. of Technology (Poland)
Mateusz Śmietana, Warsaw Univ. of Technology (Poland)
Robert Mroczyński, Warsaw Univ. of Technology (Poland)
Norbert Kwietniewski, Warsaw Univ. of Technology (Poland)
Wojtek J. Bock, Univ. du Québec en Outaouais (Canada)
Predrag Mikulic, Univ. du Québec en Outaouais (Canada)


Published in SPIE Proceedings Vol. 8902:
Electron Technology Conference 2013
Pawel Szczepanski; Ryszard Kisiel; Ryszard S. Romaniuk, Editor(s)

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