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Proceedings Paper

Plasma post-processing of diamond-like carbon nano-coated long-period gratings
Author(s): Mateusz Śmietana; Adrian Krysiński; Wojtek J. Bock; Predrag Mikulic
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Paper Abstract

This work presents an application of reactive ion etching (RIE) for effective tuning of spectral response and the refractive-index (RI) sensitivity of diamond-like carbon (DLC) nano-coated long-period gratings (LPGs). The technique allows for an efficient and well controlled etching of the DLC by means of O2 and CF4 plasma. The effect of DLC nanocoating etching on spectral properties of the LPGs is discussed. We correlated the decrease in DLC thickness with the shift of the LPG resonance wavelength. The thinning of the overlay effectively changes the distribution of the cladding modes and thus it also has an impact on the device’s RI sensitivity. The advantage of this approach is a capability for post-processing of the nano-coated structures with a good precision (etching rate from 4.6 to 8.1 nm/min for O2 plasma), cleaning the samples and their re-coating according to requested needs.

Paper Details

Date Published: 15 October 2013
PDF: 4 pages
Proc. SPIE 8924, Fourth Asia Pacific Optical Sensors Conference, 89243A (15 October 2013); doi: 10.1117/12.2031698
Show Author Affiliations
Mateusz Śmietana, Warsaw Univ. of Technology (Poland)
Adrian Krysiński, Warsaw Univ. of Technology (Poland)
Wojtek J. Bock, Univ. du Québec en Outaouais (Canada)
Predrag Mikulic, Univ. du Québec en Outaouais (Canada)

Published in SPIE Proceedings Vol. 8924:
Fourth Asia Pacific Optical Sensors Conference
Minghong Yang; Dongning Wang; Yun-Jiang Rao, Editor(s)

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