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Proceedings Paper

Dynamic method of calibration and examination piezoresistive cantilevers
Author(s): Andrzej Sierakowski; Daniel Kopiec; Magdalena Ekwińska; Tomasz Piasecki; Rafał Dobrowolski; Mariusz Płuska; Krzysztof Domański; Piotr Grabiec; Teodor P. Gotszalk
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Paper Abstract

In this paper authors present two methods of determining the cantilever displacement sensitivity. In both cases the cantilevers are examined in dynamic condition for cantilever vibrating with frequency range close to resonance frequency. One of the method uses as measurement tool a white light interferometer, the another one uses the laser interferometric vibrometer. For adequate comparing methods, obtained results refer to the same cantilever with piezoresistive Wheatstone bridge. In this paper authors also present the fabrication process of piezoresistive cantilevers with planar tip adapted for working in a shear force [1]. Additionally the piezoresistive circuit characterization by impedance spectroscopy is presented. Finally the spring constant is determined basing on frequency response of the cantilever measured from thermal noise density [2]. Basing on obtained results authors made a conclusion that both methods can be successfully used for accurate characterization piazoresistive cantilevers work in a non-contact resonance mode.

Paper Details

Date Published: 25 July 2013
PDF: 8 pages
Proc. SPIE 8902, Electron Technology Conference 2013, 890220 (25 July 2013); doi: 10.1117/12.2031522
Show Author Affiliations
Andrzej Sierakowski, Institute of Electron Technology (Poland)
Daniel Kopiec, Wrocław Univ. of Technology (Poland)
Magdalena Ekwińska, Institute of Electron Technology (Poland)
Tomasz Piasecki, Wrocław Univ. of Technology (Poland)
Rafał Dobrowolski, Institute of Electron Technology (Poland)
Mariusz Płuska, Institute of Electron Technology (Poland)
Krzysztof Domański, Institute of Electron Technology (Poland)
Piotr Grabiec, Institute of Electron Technology (Poland)
Teodor P. Gotszalk, Wrocław Univ. of Technology (Poland)

Published in SPIE Proceedings Vol. 8902:
Electron Technology Conference 2013
Pawel Szczepanski; Ryszard Kisiel; Ryszard S. Romaniuk, Editor(s)

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