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Proceedings Paper

Fiber optically addressed silicon-microresonator pressure sensor
Author(s): Zhineng Li; Deepak G. Uttamchandani; Li-Ming Zhang; Brian Culshaw
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Paper Abstract

Silicon micromechanical resonators have attracted a great deal of research interest because of their high sensitivity and the feature that the measurement of the parameter of interest is in the form of a frequency. The characteristics of optically excited and interrogated micromechanical resonators have been reported by a number of research groups but little information is available on the behaviour of these devices as sensors. In this paper, an all fibre optical system for the measurement of pressure is reported. Metal coated silicon microresonators have been excited by intensity modulated laser light delivered through an optical fibre. The vibration of the resonator is detected by an optical fibre interferometer. Optimum detection can be achieved by adjusting the distance between the end of the optical fibre and the surface of the silicon bridge. When used as a pressure sensor, the resonant frequency of the device was observed to change from 62kHz to 130kHz as the pressure varied from -0.6 bar to 1 bar (gauge).

Paper Details

Date Published: 1 August 1990
PDF: 6 pages
Proc. SPIE 1267, Fiber Optic Sensors IV, (1 August 1990); doi: 10.1117/12.20314
Show Author Affiliations
Zhineng Li, Univ. of Strathclyde (United Kingdom)
Deepak G. Uttamchandani, Univ. of Strathclyde (United Kingdom)
Li-Ming Zhang, Univ. of Strathclyde (United Kingdom)
Brian Culshaw, Univ. of Strathclyde (United Kingdom)

Published in SPIE Proceedings Vol. 1267:
Fiber Optic Sensors IV
Ralf Th. Kersten, Editor(s)

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