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Proceedings Paper

Manufacturing, measurement and control of MEMS / NEMS electrostatically driven structures
Author(s): Magdalena A. Ekwińska; Piotr Kunicki; Tomasz Piasecki; Paweł Janus; Krzysztof Domański; Tomasz Bieniek; Piotr Grabiec; Teodor Gotszalk
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Paper Abstract

Increased interest in micro-and nano-electromechanical systems (MEMS and NEMS) entail the development of reliable measurement techniques for the basic parameters of the designed and manufactured devices. The proposed methodology should provide high resolution, wide frequency range and the possibility to investigate both mechanical and electrical parameters during inspection process. In this article authors present methods for manufacturing of electrostatic MEMS devices. Measurement techniques will be presented for specifying parameters such as resonant frequency, quality factor and sensitivity of the previously manufactured structures. Manufacturing techniques will be presented on the example of the micropusher structure, whereas measurement techniques will be presented on the example of the microgripper structure.

Paper Details

Date Published: 25 July 2013
PDF: 6 pages
Proc. SPIE 8902, Electron Technology Conference 2013, 89021X (25 July 2013); doi: 10.1117/12.2031093
Show Author Affiliations
Magdalena A. Ekwińska, Institute of Electron Technology (Poland)
Piotr Kunicki, Wrocław Univ. of Technology (Poland)
Tomasz Piasecki, Wrocław Univ. of Technology (Poland)
Paweł Janus, Institute of Electron Technology (Poland)
Krzysztof Domański, Institute of Electron Technology (Poland)
Tomasz Bieniek, Institute of Electron Technology (Poland)
Piotr Grabiec, Institute of Electron Technology (Poland)
Teodor Gotszalk, Wrocław Univ. of Technology (Poland)

Published in SPIE Proceedings Vol. 8902:
Electron Technology Conference 2013
Pawel Szczepanski; Ryszard Kisiel; Ryszard S. Romaniuk, Editor(s)

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