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Proceedings Paper

Microfabricated support structures for investigations of mechanical and electrical graphene properties
Author(s): Krzysztof Gajewski; Teodor Gotszalk; Andrzej Sierakowski; Paweł Janus; Piotr Grabiec
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Paper Abstract

In this work we present the grid of microstructures which is used for the graphene mechanical and electrical properties investigations. The design of the mask used for the grid production was presented. Afterwards the technological process steps for the grid production were described. In result the support structures – trenches – in shape of lines, squares and circles are obtained with the detail dimensions varied from 1 micrometer up to 30 micrometers. Examples of graphite and graphene deposited on the support structures are also presented.

Paper Details

Date Published: 25 July 2013
PDF: 6 pages
Proc. SPIE 8902, Electron Technology Conference 2013, 89020G (25 July 2013); doi: 10.1117/12.2030886
Show Author Affiliations
Krzysztof Gajewski, Wrocław Univ. of Technology (Poland)
Teodor Gotszalk, Wrocław Univ. of Technology (Poland)
Andrzej Sierakowski, Institute of Electron Technology (Poland)
Paweł Janus, Institute of Electron Technology (Poland)
Piotr Grabiec, Institute of Electron Technology (Poland)

Published in SPIE Proceedings Vol. 8902:
Electron Technology Conference 2013
Pawel Szczepanski; Ryszard Kisiel; Ryszard S. Romaniuk, Editor(s)

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