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Proceedings Paper

Signal detection and processing system for three-dimensional imaging of nonconductive surfaces in SEM
Author(s): W. Slówko; M. Krysztof
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Paper Abstract

The three-dimensional imaging system has been developed in the form of an attachment to a SEM, which consists of a combined directional electron detector, a frame-grabber and a PC-based processing unit. The detector head is integrated with the intermediate vacuum system to separate the sample chamber allowing gas pressure over 10 hPa and the electron optical column where high vacuum must be maintained. Quantitative information about the surface topography is obtained by digital processing of four input images acquired from four electron detectors. The multi-detector system developed by authors comprises two quadruple backscattered electron detectors (of the semiconductor and ionisation types) and an ionisation secondary electron one. The semiconductor detector is dedicated for imaging of nonconductive surfaces while the ionisation one can be also used for wet or even semiliquid samples.

Paper Details

Date Published: 25 July 2013
PDF: 5 pages
Proc. SPIE 8902, Electron Technology Conference 2013, 890229 (25 July 2013); doi: 10.1117/12.2030763
Show Author Affiliations
W. Slówko, Wrocław Univ. of Technology (Poland)
M. Krysztof, Wrocław Univ. of Technology (Poland)


Published in SPIE Proceedings Vol. 8902:
Electron Technology Conference 2013
Pawel Szczepanski; Ryszard Kisiel; Ryszard S. Romaniuk, Editor(s)

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