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Proceedings Paper

3D-form metrology of arbitrary optical surfaces by absorption in fluids
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Paper Abstract

We present an imaging technique for the 3D-form metrology of optical surfaces. It is based on the optical absorption in fluids situated between the surface and a reference. An improved setup with a bi-chromatic light source is fundamental to obtain reliable topographic maps. It is able to measure any surface finish (rough or polished), form and slope and independently of scale. We present results focused on flat and spherical optical surfaces, arrays of lenses and with different surface finish (rough-polished). We achieve form accuracies from several nanometers to sub-lambda for sag departures from tens to hundred of microns. Therefore, it seems suitable for the quality control in the production of precision aspheric, freeform lenses and other complex shapes on transparent substrates, independently of the surface finish.

Paper Details

Date Published: 15 October 2013
PDF: 10 pages
Proc. SPIE 8884, Optifab 2013, 888413 (15 October 2013); doi: 10.1117/12.2030508
Show Author Affiliations
Juan Carlos Martínez Antón, Univ. Complutense de Madrid (Spain)
Juan Manuel Plaza Ortega, Univ. Complutense de Madrid (Spain)
José Alonso, Univ. Complutense de Madrid (Spain)

Published in SPIE Proceedings Vol. 8884:
Optifab 2013
Julie L. Bentley; Matthias Pfaff, Editor(s)

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