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Proceedings Paper

Characterization and application of HfO2 - SiO2 mixtures produced by ion-beam sputtering technology
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Paper Abstract

In the past years the usage of mixed oxides coatings lead to an important improvement of laser damage threshold and quality of optical elements. In this study influence of post treatment procedure - ex-situ annealing - is examined in terms of quality, optical constants and laser induced damage threshold (LIDT) of mixed HfO2 and SiO2 coatings. Monolayer thin films containing different fractions of HfO2 are deposited with ion beam sputtering technology (IBS.) All samples are post annealed at different temperatures and optimal regimes are defined. Refractive index and absorption coefficient dispersion is evaluated from transmission spectra measurements. Surface roughness of all samples is characterized before and after deposition and annealing, using atomic force microscopy (AFM). Microstructural changes are identified from changes in surface topography. Further, optical resistance was characterized by 5.7 ns duration pulses for 355 nm wavelength laser radiation, performing 1-on-1 sample exposure tests with high resolution micro-focusing approach for monolayer samples and S-on-1 tests for multilayer reflectors. Morphology of damaged sites was analyzed through optical microscopy. Finally, conclusions about annealing effect for mixed HfO2 and SiO2 monolayer and multilayer coatings are made.

Paper Details

Date Published: 14 November 2013
PDF: 7 pages
Proc. SPIE 8885, Laser-Induced Damage in Optical Materials: 2013, 888521 (14 November 2013); doi: 10.1117/12.2030308
Show Author Affiliations
S. Kičas, Ctr. for Physical Sciences and Technology (Lithuania)
Gintarė Batavičiūtė, Vilnius Univ. (Lithuania)
Kęstutis Juškevičius, Ctr. for Physical Sciences and Technology (Lithuania)
Tomas Tolenis, Ctr. for Physical Sciences and Technology (Lithuania)
Ramutis Drazdys, Ctr. for Physical Sciences and Technology (Lithuania)
Rytis Buzelis, Ctr. for Physical Sciences and Technology (Lithuania)
Andrius Melninkaitis, Vilnius Univ. (Lithuania)


Published in SPIE Proceedings Vol. 8885:
Laser-Induced Damage in Optical Materials: 2013
Gregory J. Exarhos; Vitaly E. Gruzdev; Joseph A. Menapace; Detlev Ristau; MJ Soileau, Editor(s)

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