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Proceedings Paper

Metal oxide nanostructures for gas detection
Author(s): Wojciech Maziarz; Tadeusz Pisarkiewicz; Artur Rydosz; Kinga Wysocka; Grzegorz Czyrnek
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Paper Abstract

Currently, most of gas sensors on the market are produced in thin or thick film technologies with the use of ceramic substrates. It is expected that the miniature sensors needed in portable applications will be based on one-dimensional structures due to their low power consumption, fast and stable time response, small dimensions and possibility of embedding in integrated circuit together with signal conditioning electronics. The authors manufactured resistance type gas sensors based on ZnO and WO3 nanostructures. ZnO:Al nanorods with good cristallinity were obtained with electrodeposition method, while ZnO:Al nanofibres with varying diameters were obtained by electrospinning method. The sensors were built as a nanowire network. WO3 films with nanocrystalline surface were manufactured by deposition of a three layer WO3/W/WO3 structure by RF sputtering and successive annealing of the structure in appropriate temperature range. In effect a uniform nanostructurized metal oxide layer was formed. Investigation of sensors characteristics revealed good sensitivity to nitrogen dioxide at temperatures lower than these for conventional conductometric type sensors.

Paper Details

Date Published: 25 July 2013
PDF: 8 pages
Proc. SPIE 8902, Electron Technology Conference 2013, 890226 (25 July 2013); doi: 10.1117/12.2030298
Show Author Affiliations
Wojciech Maziarz, AGH Univ. of Science and Technology (Poland)
Tadeusz Pisarkiewicz, AGH Univ. of Science and Technology (Poland)
Artur Rydosz, AGH Univ. of Science and Technology (Poland)
Kinga Wysocka, AGH Univ. of Science and Technology (Poland)
Grzegorz Czyrnek, AGH Univ. of Science and Technology (Poland)

Published in SPIE Proceedings Vol. 8902:
Electron Technology Conference 2013
Pawel Szczepanski; Ryszard Kisiel; Ryszard S. Romaniuk, Editor(s)

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