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Proceedings Paper

Displacement sensor with electronically scanned white-light interferometer
Author(s): Andreas Koch; Reinhard Ulrich
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Paper Abstract

Absolute displacement sensing by white-light interferometry is demonstrated without mechanically moving parts in the receiving interferoineter. Its characteristics are: Michelson interferomneter with tilted mirrors, photodiode array of 1024 elements, lead-insensitivity up to 9 dB loss, displacement range 75 /.m, resolution 0.02 pm, read- out time < 7 ins, and multiplexing of several transducers.

Paper Details

Date Published: 1 August 1990
PDF: 8 pages
Proc. SPIE 1267, Fiber Optic Sensors IV, (1 August 1990); doi: 10.1117/12.20297
Show Author Affiliations
Andreas Koch, Technische Univ. Hamburg-Harburg (Germany)
Reinhard Ulrich, Technische Univ. Hamburg-Harburg (Germany)

Published in SPIE Proceedings Vol. 1267:
Fiber Optic Sensors IV
Ralf Th. Kersten, Editor(s)

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